Graphene-assisted electro-optomechanical integration on a silicon-on-insulator platform
نویسندگان
چکیده
منابع مشابه
Vertical integration of high-Q silicon nitride microresonators into silicon-on-insulator platform.
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ژورنال
عنوان ژورنال: Optics Express
سال: 2020
ISSN: 1094-4087
DOI: 10.1364/oe.382770